Lab Services > FIB Micromachining Laboratory
FIB Milling Capability
FIB Milling Capability Sample Applications Imaging & Analysis
Oregon Physics is using its plasma ion source on a custom focused ion beam (FIB) instrument to enable much larger milled volumes than can be achieved with a traditional liquid metal ion source (LMIS) FIB.
This instrument uses inert argon or xenon ions to provide Gallium-free milling capability at high resolution with high throughput. The high volume removal rate of this tool allows us to create large cross-sections for customers at a low cost.
The graph shows the operating capability of our plasma and gallium FIBs, in terms of milling resolution versus milling speed.
Operating capability of our plasma and gallium FIBs.
With our Plasma-FIB system, mill speed is extended by almost 3 orders of magnitude over a conventional FIB Lab. Our conventional gallium FIB is suitable for low volume and high resolution milling. It is considerably more economical to remove the majority of material with our Plasma-FIB when milling structures with linear dimensions in excess of ~30µm or mill volumes in excess of 25,000µm3.
Oregon Physics, LLC
19075 NW Tanasbourne Dr., Suite 150
• Hillsboro, OR 97124 USA
Phone: 503.601.0041 • Fax: 503-992-6710 • Email: info@oregon-physics.com
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