Oregon Physics - High Brightness Ion Beamsphysic collage
Oregon Physics: High Brightness Ion Beams
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Lab Services > FIB Micromachining Laboratory

Imaging & Analysis

The variety of imaging and analysis capabilities in Oregon Physics' focused ion beam (FIB) micromachining laboratory allows us to capture information of interest to you, our customer.

  • We can take secondary electron and ion images with the liquid metal ion source (LMIS) FIB or with the plasma FIB.
  • We have an in-house Amray 1280 scanning electron microscope (SEM) for medium resolution imaging and metrology.
  • We have access to Field Emission SEMs for high resolution backscattered and secondary electron imaging.
  • We have EDAX material analysis capabilities.

Examples

Gallium LMIS   Copper Via

A Gallium LMIS FIB image of a cross-sectioned copper via showing large contrast between the copper grains.

 

A backscattered electron image from a scanning electron microscope (SEM) showing the same cross-sectioned copper via. In this image there is good contrast showing small voids in the copper via.


Oregon Physics, LLC
19075 NW Tanasbourne Dr., Suite 150 • Hillsboro, OR 97124  USA
Phone: 503.601.0041 • Fax: 503-992-6710 • Email: info@oregon-physics.com

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