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Oregon Physics: High Brightness Ion Beams
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Research & Development

Nanoscale FIB Milling

NSF Grant Performance Targets Exerimental Results Technical Publications

We are conducting research to increase the performance of the plasma ion source FIB for producing nanoscale probes with the goal of matching the performance of the Gallium LMI Source with inert ions. We have been awarded a NSF Phase 1 SBIR Grant to improve the performance of our ion source for nanoscale, microscale, and macroscale machining applications.

 

 

Oregon Physics, LLC
19075 NW Tanasbourne Dr., Suite 150 • Hillsboro, OR 97124  USA
Phone: 503.601.0041 • Fax: 503-992-6710 • Email: info@oregon-physics.com

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