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Oregon Physics: High Brightness Ion Beams
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Research & Development > Nanoscale FIB Milling

Performance Targets

NSF Grant Performance Targets Experimental Results Technical Publications

The research program entitled Novel Ion Source for Enhanced Focused Ion Beam Material Removal at the Nano, Micro and Macro-Scales is aiming to reduce the energy spread of the plasma ion source to below 2eV and increase the beam brightness to ~1x105 Am-2sr-1V-1. If the program is successful the performance of the next generation plasma ion source would approach the performance of the Gallium LMI Source providing a new high resolution capability with inert ions.

 

 

 

 

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